BOLOMETRIC DETECTOR WITH COMPENSATION BOLOMETER HAVING IMPROVED THERMAL EQUILIBRATION

摘要

PROBLEM TO BE SOLVED: To provide a bolometric detector that is provided with a compensation bolometer based upon a suspended membrane having an improved thermal equilibration with respect to a substrate.SOLUTION: A bolometric detector includes: a bolometric compensation microbridge 214 including electrically-conductive anchoring nails 16 connected to a read circuit, and a thermometric element 20 arranged in a membrane attached to the anchoring nails; and a thermal short-circuiting element 226 between the membrane of each compensation microbridge and a substrate 14. The thermal short-circuiting element under each compensation microbridge includes a metal pattern arranged under the bolometric element of each compensation microbridge, and in contact with the membrane of the compensation microbridge and the substrate.