CIRCULAR LAMP ARRAYS

摘要

Embodiments disclosed herein relate to circular lamp arrays for use in a semiconductor processing chamber. Circular lamp arrays utilizing one or more torroidal lamps disposed in a reflective trough and arranged in a concentric circular pattern may provide for improved rapid thermal processing. The reflective troughs, which may house the torroidal lamps, may be disposed at various angles relative to a surface of a substrate being processed.

主权项

1. A lamphead apparatus, comprising:
a body having a bottom surface defining a plane; and a reflective trough formed in the body, wherein a focal axis of the trough is angled relative to an axis normal to the plane defined by the bottom surface.