MASK ADJUSTMENT UNIT, MASK DEVICE, AND APPARATUS AND METHOD FOR PRODUCING MASK

摘要

[Object] To provide techniques such as a mask adjustment unit capable of appropriately adjusting the position of a mask pattern.;[Solving Means] A mask adjustment unit according to the present technology includes a base body, a movable member, and an adjustment mechanism. The movable member supports a side of an outer edge portion of a mask main body and is movably provided on the base body, the mask main body having the outer edge portion. The adjustment mechanism applies, to the mask body via the movable member, both pulling tension force from the outer edge portion of the mask main body to outside of the mask main body and pressing force pressing from the outer edge portion to inside of the mask main body, the mask body being supported by the movable member.

主权项

1. A mask adjustment unit, comprising:
a base body; a movable member that supports a side of an outer edge portion of a mask main body and is movably provided on the base body, the mask main body having the outer edge portion; and an adjustment mechanism that applies, to the mask body via the movable member, both pulling tension force from the outer edge portion of the mask main body to outside of the mask main body and pressing force pressing from the outer edge portion to inside of the mask main body, the mask body being supported by the movable member.