APPARATUS AND METHOD FOR ACCURATE MEASUREMENT AND MAPPING OF FORWARD AND REVERSE-BIAS CURRENT-VOLTAGE CHARACTERISTICS OF LARGE AREA LATERAL P-N JUNCTIONS

摘要

Methods and apparatus for providing measurements in p-n junctions and taking into account the lateral current for improved accuracy are disclosed. The lateral current may be controlled, allowing the spreading of the current to be reduced or substantially eliminated. Alternatively or additionally, the lateral current may be measured, allowing a more accurate normal current to be calculated by compensating for the measured spreading. In addition, the techniques utilized for controlling the lateral current and the techniques utilized for measuring the lateral current may also be implemented jointly.