| 发明名称 |
STRAIN SENSOR AND METHOD FOR MANUFACTURING THE SAME |
| 摘要 |
According to one embodiment, a strain sensor includes a substrate, a lid, a frame, and a sensing unit. The substrate has a first surface. The lid is provided on the first surface. The frame is provided between the substrate and the lid. The frame is nonconductive and includes a magnetic body. The sensing unit is provided inside the frame between the substrate and the lid, and includes a magnetoresistance effect element. |
| 申请公布号 |
US2015069540(A1) |
申请公布日期 |
2015.03.12 |
| 申请号 |
US201414203868 |
申请日期 |
2014.03.11 |
| 申请人 |
Kabushiki Kaisha Toshiba |
发明人 |
ASANO Yusaku;HIGUCHI Kazuhito;MIYAGI Takeshi;HIGASHI Yoshihiro;HARA Michiko;FUKUZAWA Hideaki;KII Masayuki;FUJISAWA Eizo |
| 分类号 |
G01L1/12;H01L43/12;H01L43/08;H01L29/84 |
主分类号 |
G01L1/12 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A strain sensor, comprising:
a substrate having a first surface; a lid provided on the first surface; a frame provided between the substrate and the lid, the frame being nonconductive and including a magnetic body; and a sensing unit provided inside the frame between the substrate and the lid, the sensing unit including a magnetoresistance effect element. |
| 地址 |
Minato-ku JP |
