| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure gradient type plasma gun having a simple construction and a reduced consumption of an auxiliary electrode, to reduce the maintenance cost for the plasma gun and to improve the operation rate.SOLUTION: A pressure gradient type plasma gun comprises: a substrate 10 connected with a cathode; and a cathode protecting tube 20 having one end 20b connected gas-tight to the substrate and an opening 21 formed in the other end part 20a. In the cathode protecting tube, there are arranged sequentially from the substrate side: a gas conduit tube 12 having a through hole 12a communicating with a gas source communication hole 10a of the substrate; an auxiliary electrode flat plate 30 for cutting off the axis of the cathode protecting tube in the rectangular direction at a spacing from the gas conduit tube; and a main electrode 40 disposed on the opening side of the auxiliary electrode flat plate and having an aperture 40a concentric with the opening. The auxiliary electrode flat plate is equipped with a gas introduction port 35 in a marginal part 30b of the auxiliary electrode flat plate. The distance between the auxiliary electrode flat plate and the main electrode is 2 times or less to 0.3 times and more the opening diameter of the main electrode. The material of the auxiliary electrode flat plate is made of a material having a lower heat-resistant temperature than that of the material of the main electrode. |
