| 摘要 |
PROBLEM TO BE SOLVED: To provide a cryogenic temperature unit or a cryopump capable of adjusting thermal load, and suppressing heat flow to components.SOLUTION: A cryogenic unit or a cryopump includes a refrigerating machine, at least one cryogenic exhaust surface, and at least one thin electric heating element connected to the cryogenic exhaust surface. Further a radiation shield may be disposed, and the radiation shield may be provided with the thin electric heating element. Temperatures of the cryogenic exhaust surface, the radiation shield or other component are controlled by the heating element. The temperature control using the heating element may be automated by a controller. |
