发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To improve performance of a semiconductor device by preventing the occurrence of read noise in a pixel which composes an image pickup element.SOLUTION: In a semiconductor device, gate insulation films G1 of an amplification transistor AMI, a selection transistor and a reset transistor, which compose a pixel are composed of an insulation film ON and an La-containing capping film LA. By introducing La to the gate insulation film G1, a threshold voltage of each transistor is reduced thereby to prevent the occurrence of 1/f noise in a signal amplification operation and the like.</p>
申请公布号 JP2015046505(A) 申请公布日期 2015.03.12
申请号 JP20130177098 申请日期 2013.08.28
申请人 RENESAS ELECTRONICS CORP 发明人 TOMIMATSU TAKAHIRO
分类号 H01L27/146 主分类号 H01L27/146
代理机构 代理人
主权项
地址