| 发明名称 |
USING THREE-DIMENSIONAL REPRESENTATIONS FOR DEFECT-RELATED APPLICATIONS |
| 摘要 |
<p>Various embodiments for using three-dimensional representations for defect-related applications are provided.</p> |
| 申请公布号 |
EP2718967(A4) |
申请公布日期 |
2015.03.11 |
| 申请号 |
EP20120797503 |
申请日期 |
2012.06.06 |
| 申请人 |
KLA-TENCOR CORPORATION |
发明人 |
PARK, ALLEN;CHANG, ELLIS;AJI, PRASHANT A.;LANGE, STEVEN, R. |
| 分类号 |
H01L21/66;G01N21/95;G06F17/50 |
主分类号 |
H01L21/66 |
| 代理机构 |
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代理人 |
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| 地址 |
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