| 摘要 |
<p>[Object] To provide a liquid delivery apparatus capable of cutting the number of installation steps, eliminating the necessity of connectors such as couplings, and reducing the apparatus size. [Solving Means] The liquid delivery apparatus comprises a pressure reducing valve for adjusting pressure of pressurized gas, a pressure supply joint for supplying the pressurized gas having the adjusted pressure, and a solenoid valve for selectively establishing or cutting off communication between the pressure reducing valve and the pressure supply joint. The solenoid valve and the pressure reducing valve are arranged integrally with a manifold having channels formed therein. The solenoid valve and the pressure reducing valve are arranged on outer surfaces of the manifold.</p> |
