摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method in which a cerium oxide based abrasive which can ground by a high polishing speed can be manufactured from a cerium oxide-based abrasive to which an amorphous object of glass or the like is adhered. <P>SOLUTION: An amorphous object adhering to a surface of a cerium oxide-based abrasive is dissolved by adding the first alkali component to a suspension of a cerium oxide-based abrasive in which an amorphous object adheres to a surface. After a dissolving process, the second alkali component is added to the suspension, and the cerium oxide-based abrasive is settled. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |