| 发明名称 |
Method and apparatus for chemical-mechanical polishing |
| 摘要 |
<p>In accordance with certain embodiments, a method can be utilized that includes depositing a backfill material layer over a reader stack; depositing a chemical-mechanical-polishing stop layer above the layer of backfill material; and depositing a sacrificial layer on top of the chemical-mechanical-polishing stop layer.
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| 申请公布号 |
EP2779168(A3) |
申请公布日期 |
2015.03.11 |
| 申请号 |
EP20140159077 |
申请日期 |
2014.03.12 |
| 申请人 |
SEAGATE TECHNOLOGY LLC |
发明人 |
SINGLETON, ERIC WALTER;MCKINLAY, SHAUN ERIC;WAKEHAM, STACEY CHRISTINE |
| 分类号 |
G11B5/39;G11B5/31 |
主分类号 |
G11B5/39 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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