| 摘要 |
<p>[Objective] Provided is a charged particle beam apparatus capable of preventing a damage layer from being formed on the surface of a specimen. [Solution] It includes an electron beam irradiation part which irradiates an electron beam of a first irradiation axis to a specimen, a rotation stage which can maintain the specimen and a rotation axis vertical to the first irradiation axis, an ion beam irradiation part which irradiates an ion beam of a second irradiation axis parallel to the rotation axis to the specimen, a detection part which detects at least one side of light or charged particles generated though the specimen by the ion beam and the electron beam irradiation, and a gas ion beam irradiation part which irradiates a gas ion beam to the specimen.</p> |
