Method of producing a photonic device and corresponding photonic device

摘要

Method of producing a photonic device including at least one light source and at least one photodetector on a structure including a waveguide layer, this method comprising the following steps:
g) growing successively on a substrate (10), a photodetection structure (11) and a light source structure (12),
h) bonding the structure obtained by step a) to the said waveguide structure (2), the light source structure being in contact with the said waveguide structure (2),
i) removing the substrate (10) from the structure obtained by step b),
j) etching the structure (3) obtained by step c) to define the at least one photodetector (4),
k) etching the structure obtained by step d) to define the at least one light source (5),
l) forming electrodes (44, 43; 54, 53) on the least one photodetector (4) and on the least one light source (5).