发明名称 SHARED MASKS FOR X-LINES AND SHARED MASKS FOR Y-LINES FOR FABRICATION OF 3D MEMORY ARRAYS
摘要 A structure and a method of manufacturing a three dimensional memory using a number of bit line masks that is less than the number of device layers. A first bit line mask is used to form a first bit line layer in a first device level. The first bit line layer comprises first bit lines. The first bit line mask is also used to form a second bit line layer in a second device level. The second bit line layer comprises second bit lines. The first bit lines and the second bit lines have different electrical connections to a bit line connection level despite employing the same mask pattern.
申请公布号 KR101501105(B1) 申请公布日期 2015.03.11
申请号 KR20117006681 申请日期 2009.09.03
申请人 发明人
分类号 H01L21/8247;H01L27/115 主分类号 H01L21/8247
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