发明名称 |
SUBSTRATE STRUCTURE AND METHOD FOR PREPARING THE SAME |
摘要 |
The present invention relates to a hybrid organic/inorganic thin film and a manufacturing method thereof and, more particularly, to a hybrid organic/inorganic thin film including a stable and novel functional group, and to a method of manufacturing a hybrid organic/inorganic thin film formed via a molecular layer deposition technique by alternately using organic and inorganic precursors. |
申请公布号 |
KR20150026748(A) |
申请公布日期 |
2015.03.11 |
申请号 |
KR20140018212 |
申请日期 |
2014.02.18 |
申请人 |
IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY) |
发明人 |
SUNG, MYUNG MO;HAN, KYU SEOK |
分类号 |
C23C16/00;C23C16/448 |
主分类号 |
C23C16/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|