| 摘要 |
<p>Disclosed is an apparatus for processing a substrate. The apparatus for processing the substrate includes a processing chamber with a space inside, a support unit which is arranged in the processing chamber, supporting the substrate, an antenna member which is arranged on the upper side of the support unit, having an antenna with a slot, and a microwave applying unit which applies microwaves to the antenna. The microwave applying unit includes a first waveguide which is connected to a microwave generator, a second waveguide which is extended from the first waveguide and transmits the microwaves to the antenna, a phase converter which is formed at a connection point between the first waveguide and the second waveguide, converting the phase of the microwave, and a matching waveguide which is located to be opposite to the first waveguide based on the phase converter, reflecting the microwave passing through to the phase converter. The length of the space in the matching waveguide is changeable.</p> |
