| 发明名称 |
ORGANIC INORGANIC HYBRID THIN FILMS AND METHOD FOR PREPARING THE SAME |
| 摘要 |
<p>The present invention relates to an organic/inorganic hybrid thin film and a method for producing the same. More specifically, the present invention relates to an organic/inorganic hybrid thin film including a stable novel functional group and to a method for producing an organic/inorganic hybrid film including a molecular layer depositing technique by alternately using an inorganic precursor and an organic precursor.</p> |
| 申请公布号 |
KR20150026747(A) |
申请公布日期 |
2015.03.11 |
| 申请号 |
KR20140018155 |
申请日期 |
2014.02.17 |
| 申请人 |
IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY) |
发明人 |
SUNG, MYUNG MO;HAN, KYU SEOK |
| 分类号 |
C07F3/06;C07F7/00;C23C16/448;H01L21/205 |
主分类号 |
C07F3/06 |
| 代理机构 |
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