Piezoelectric film, piezoelectric device, liquid ejection apparatus, and method of producing piezoelectric film

摘要

A piezoelectric film (13) is formed on a surface of a substrate (12) by a vapor deposition process without generating grain boundaries which are substantially parallel to the surface of the substrate (L2) and are caused by lamination. A normal of a (100) plane of each of crystals constituting the piezoelectric film (13) is inclined from a normal of the surface of the substrate (12) by an angle of not smaller than 6° and not larger than 36°.