发明名称 Light coupling device and methods of forming same
摘要 An embodiment is a semiconductor device comprising an optical device over a first substrate, a vertical waveguide on a top surface of the optical device, the vertical waveguide having a first refractive index, and a capping layer over the vertical waveguide, the capping layer configured to be a lens for the vertical waveguide and the capping layer having a second refractive index.
申请公布号 US8976833(B2) 申请公布日期 2015.03.10
申请号 US201313797999 申请日期 2013.03.12
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Lai Jui Hsieh;Kuo Ying-Hao;Chen Hai-Ching;Bao Tien-I
分类号 H01S5/00;H01S5/026 主分类号 H01S5/00
代理机构 Slater & Matsil, L.L.P. 代理人 Slater & Matsil, L.L.P.
主权项 1. A semiconductor device comprising: an optical device over a first substrate; a vertical waveguide on a top surface of the optical device, the vertical waveguide having a first refractive index; and a capping layer over the vertical waveguide, the capping layer configured to be a lens for the vertical waveguide and the capping layer having a second refractive index.
地址 Hsin-Chu TW