发明名称 |
Light coupling device and methods of forming same |
摘要 |
An embodiment is a semiconductor device comprising an optical device over a first substrate, a vertical waveguide on a top surface of the optical device, the vertical waveguide having a first refractive index, and a capping layer over the vertical waveguide, the capping layer configured to be a lens for the vertical waveguide and the capping layer having a second refractive index. |
申请公布号 |
US8976833(B2) |
申请公布日期 |
2015.03.10 |
申请号 |
US201313797999 |
申请日期 |
2013.03.12 |
申请人 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
发明人 |
Lai Jui Hsieh;Kuo Ying-Hao;Chen Hai-Ching;Bao Tien-I |
分类号 |
H01S5/00;H01S5/026 |
主分类号 |
H01S5/00 |
代理机构 |
Slater & Matsil, L.L.P. |
代理人 |
Slater & Matsil, L.L.P. |
主权项 |
1. A semiconductor device comprising:
an optical device over a first substrate; a vertical waveguide on a top surface of the optical device, the vertical waveguide having a first refractive index; and a capping layer over the vertical waveguide, the capping layer configured to be a lens for the vertical waveguide and the capping layer having a second refractive index. |
地址 |
Hsin-Chu TW |