| 发明名称 | System and method for overhead cross-system transportation | ||
| 摘要 | A system for managing semiconductor production includes a conveyor to convey a wafer carrier to or from an overhead hoist transfer system. The system also includes a cross-system transport apparatus to transfer the wafer carrier between the conveyor and an overhead shuttle system. | ||
| 申请公布号 | US8977387(B2) | 申请公布日期 | 2015.03.10 |
| 申请号 | US201012764493 | 申请日期 | 2010.04.21 |
| 申请人 | Taiwan Semiconductor Manufacturing Company, Ltd. | 发明人 | Wang Wei-Cheng;Lee Feng-Ning |
| 分类号 | G06F7/00;H01L21/677 | 主分类号 | G06F7/00 |
| 代理机构 | Lowe Hauptman & Ham, LLP | 代理人 | Lowe Hauptman & Ham, LLP |
| 主权项 | 1. A system for managing semiconductor production, the system comprising: a conveyor to convey a wafer carrier to or from an overhead hoist transfer (OHT) system; a cross-system transport apparatus to transfer the wafer carrier between the conveyor and an overhead shuttle (OHS) system; and a controller configured to output control signals to control at least one of the cross-system transport apparatus, the conveyor, and the loading or unloading of the wafer carrier at the OHT or the OHS, wherein the cross-system transport apparatus comprises a lifting device configured to raise or lower the wafer carrier. | ||
| 地址 | TW | ||