| 摘要 |
<p>The present invention relates to apparatus for growing a single crystal comprising: a chamber; a crucible which is arranged in the chamber and holds a liquid of a melted raw material; a crucible support which is arranged under the crucible and supports the crucible; a first weight sensor measuring the weight of the liquid of a melted raw material in the crucible; a second weight sensor measuring the weight of an ingot growing from the liquid of a melted raw material, and a control unit adding up the weight of the liquid of a melted raw material measured by the first weight sensor and the weight of the ingot measured by the second weight sensor and comparing the calculations with a reference value, and detecting a leakage of the liquid of a melted raw material from the crucible depending on a comparative result. According to the present invention, the leakage of the liquid of a melted raw material from the crucible is automatically detectable in real time, and damage and explosion caused by the liquid of a melted raw material leaked from the crucible can be prevented.</p> |
