<p>The present invention relates to a sample fixing device which can fixate a sample in both a process processing the sample by using a focused ion beam (FIB) with one fixing device, and a process analyzing the processed sample by using transmission electron microscopy (TEM). The sample fixing device according to an embodiment of the present invention comprises: a first holder; and a second holder detachably coupled to the first holder, and where a grid is fixated.</p>
申请公布号
KR20150025149(A)
申请公布日期
2015.03.10
申请号
KR20130102409
申请日期
2013.08.28
申请人
SAMSUNG ELECTRO-MECHANICS CO., LTD.
发明人
CHA, JIN UK;KIM, GYU SEOK;HAM, SUK JIN;YANG, EUN JU;KIM, MI YANG;PARK, SUNG YEOL