发明名称 FIXING DEVICE OF SAMPLE
摘要 <p>The present invention relates to a sample fixing device which can fixate a sample in both a process processing the sample by using a focused ion beam (FIB) with one fixing device, and a process analyzing the processed sample by using transmission electron microscopy (TEM). The sample fixing device according to an embodiment of the present invention comprises: a first holder; and a second holder detachably coupled to the first holder, and where a grid is fixated.</p>
申请公布号 KR20150025149(A) 申请公布日期 2015.03.10
申请号 KR20130102409 申请日期 2013.08.28
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 CHA, JIN UK;KIM, GYU SEOK;HAM, SUK JIN;YANG, EUN JU;KIM, MI YANG;PARK, SUNG YEOL
分类号 G01N1/36;H01J37/20 主分类号 G01N1/36
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