发明名称 Laser crystal degradation compensation
摘要 Method and system for laser crystal degradation compensation are disclosed. The method includes: defining a plurality of sites on a frequency converting crystal; determining a degradation rate associated with each of the plurality of sites; determining an amount of time T wherein a site is continuously operable within a tolerated variation of at least one beam parameter, the amount of time T being determined based on the tolerated variation of the at least one beam parameter and the degradation rate; determining an amount of time t wherein t is a fraction of T; and iteratively shifting among the plurality of sites, wherein each of the plurality of sites is utilized continuously for a duration of time t for each iteration.
申请公布号 US8976343(B2) 申请公布日期 2015.03.10
申请号 US201313905346 申请日期 2013.05.30
申请人 KLA-Tencor Corporation 发明人 Genis Patrick C.
分类号 G01N21/00;G01N21/88;G02F1/35 主分类号 G01N21/00
代理机构 Suiter Swantz pc llo 代理人 Suiter Swantz pc llo
主权项 1. A method for laser crystal degradation compensation, comprising: defining a plurality of sites on a frequency converting crystal; determining a degradation rate associated with each of the plurality of sites; determining an amount of time T wherein a site is continuously operable within a tolerated variation of at least one beam parameter, the amount of time T being determined based on the tolerated variation of the at least one beam parameter and the degradation rate; determining an amount of time t wherein t is a fraction of T; and iteratively shifting among the plurality of sites, wherein each of the plurality of sites is utilized continuously for a duration of time t for each iteration.
地址 Milpitas CA US