发明名称 |
Laser crystal degradation compensation |
摘要 |
Method and system for laser crystal degradation compensation are disclosed. The method includes: defining a plurality of sites on a frequency converting crystal; determining a degradation rate associated with each of the plurality of sites; determining an amount of time T wherein a site is continuously operable within a tolerated variation of at least one beam parameter, the amount of time T being determined based on the tolerated variation of the at least one beam parameter and the degradation rate; determining an amount of time t wherein t is a fraction of T; and iteratively shifting among the plurality of sites, wherein each of the plurality of sites is utilized continuously for a duration of time t for each iteration. |
申请公布号 |
US8976343(B2) |
申请公布日期 |
2015.03.10 |
申请号 |
US201313905346 |
申请日期 |
2013.05.30 |
申请人 |
KLA-Tencor Corporation |
发明人 |
Genis Patrick C. |
分类号 |
G01N21/00;G01N21/88;G02F1/35 |
主分类号 |
G01N21/00 |
代理机构 |
Suiter Swantz pc llo |
代理人 |
Suiter Swantz pc llo |
主权项 |
1. A method for laser crystal degradation compensation, comprising:
defining a plurality of sites on a frequency converting crystal; determining a degradation rate associated with each of the plurality of sites; determining an amount of time T wherein a site is continuously operable within a tolerated variation of at least one beam parameter, the amount of time T being determined based on the tolerated variation of the at least one beam parameter and the degradation rate; determining an amount of time t wherein t is a fraction of T; and iteratively shifting among the plurality of sites, wherein each of the plurality of sites is utilized continuously for a duration of time t for each iteration. |
地址 |
Milpitas CA US |