| 摘要 |
The present invention relates to an apparatus for measuring the peel strength of a substrate, which comprises: a stage for mounting a substrate to be inspected where a thin film layer is attached; an operating rod which is placed on the substrate to be inspected; a fixating rod which is positioned at a measurement point on the substrate to be inspected, and is placed independently from the operating rod in order to support and retain the measurement point on the substrate to be inspected at the same height; and a load cell which measures the load of the operating rod. Therefore, the apparatus for measuring the peel strength of a substrate can accurately measure the peel strength of an interface between the thin film layer and the substrate by fixating the thin film layer and displacing the substrate. |
