Ex-situ cleaning assembly

摘要

A cleaning assembly is provided. The cleaning assembly includes a plate having a front surface and a back surface and a manifold affixed to an edge of the plate. The manifold has a plurality of outlets extending therefrom. The plate further includes a plurality of cups extending through the plate. The plurality of cups have an upper body with an outlet extending from the back surface and the plurality of cups have a sealing portion coupled to the upper body and extending from the front surface of the plate. Each outlet of the upper body is coupled to one of the corresponding plurality of outlets of the manifold. The plate also includes a plurality of alignment pins extending from the front surface of the plate. The plurality of alignment pins are configured to support an edge of a substrate, wherein one of the plurality of alignment pins is slidably mounted to the plate. A plurality of guide pins extends the same distance from the back surface.

主权项

1. A cleaning assembly, comprising:
a plate having a front surface and a back surface; a manifold affixed to an edge of the plate, the manifold having a plurality of outlets extending therefrom, wherein the plate further comprises; a plurality of cups extending through the plate, the plurality of cups having an upper body with an outlet extending from the back surface and the plurality of cups having a sealing portion extending from the front surface, each outlet of the upper body coupled to one of the corresponding plurality of outlets of the manifold; a plurality of alignment pins extending from the front surface, the plurality of alignment pins configured to support an edge of a substrate over the sealing portion of the plurality of cups, wherein one of the plurality of alignment pins is slidably mounted to the plate; and a plurality of guide pins each extending a same distance from the back surface.