TWO-FLOW TURBOMOLECULAR VACUUM PUMP WITH HYBRID AIR-GAS CHANNELS

摘要

FIELD: engines and pumps.SUBSTANCE: pump contains a housing with an input branch pipe and with two symmetrically located air-gas channels with reference to the input branch pipe. Each part consists of turbomolecular, intermediate and output molecular stages. The intermediate stage is designed as two circular molecular stages concentrically located to each other with the centre of location on the shaft rotation axis. The first circular molecular stage is located on a face surface of the cover located between the injection side of the turbomolecular stage and the suction side of the second circular molecular stage. The latter is located between the injection side of the first circular molecular stage and the suction side of the output stage with formation of flow of evacuated gas from the periphery to the centre to the suction side of the output stage. The output stage is formed by two equidistant cylindrical sections between the internal surface of the rotor and the external surface of the housing of bearing assembly. On the external surface of the assembly housing multiple-thread helical flutes are made.EFFECT: improvement of evacuation characteristics of the pump due to increase of level of compression of intermediate and output stages and as a result increase of output pressure of the pump.17 cl, 2 dwg