Image sensor, lithographic apparatus comprising an image sensor and use of an image sensor in a lithographic apparatus

摘要

The invention relates to an image sensor for detection of an aerial image formed by a beam of radiation in a lithographic projection apparatus for exposing a pattern onto a substrate held in a substrate plane by a substrate holder. The image sensor has an image detector and a lens. The lens is arranged to project at least part of the aerial image onto the image detector. The image sensor is positioned such within the substrate holder that the lens is positioned proximate the substrate plane.

主权项

1. A lithographic projection apparatus for exposing a pattern onto a substrate held in a substrate plane by a substrate holder, comprising:
an image sensor comprising: an image detector; and a lens arranged to project at least part of an aerial image of an alignment mark onto said image detector; wherein said image sensor is positioned within said substrate holder such that said lens is positioned proximate said substrate plane; and a patterning device comprising the pattern, wherein the pattern includes the alignment mark that is of comparable dimensions to critical dimension features of the pattern.