SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND STORAGE MEDIUM

摘要

The present invention is to improve productivity. A substrate processing method according to an aspect of an embodiment comprises: a treatment liquid supply process of supplying treatment liquid containing a volatile component to form a film on the substrate with a substrate conducted with pretreatment requiring atmosphere management or time management after treatment; and an accommodation process of accommodating the substrate where the treatment liquid is aged or hardened as the volatile component volatilizes.