发明名称 PERFORATED CONTACT ELECTRODE ON VERTICAL NANOWIRE ARRAY
摘要 Disclosed herein is a structure having: a support, a plurality of nanowires perpendicular to the support, and an electrode in contact with a first end of each nanowire. Each nanowire has a second end in contact with the support. The electrode contains a plurality of perforations. The electrode contains a plurality of perforations. Also disclosed herein is a method of: providing the above support and nanowires; depositing a layer of a filler material that covers a portion of each nanowire and leaves a first end of each nanowire exposed; depositing a plurality of nanoparticles onto the filler material; depositing an electrode material on the nanoparticles, the ends of the nanowires, and any exposed filler material; and removing the nanoparticles and filler material to form an electrode in contact with the first end of each nanowire; wherein the electrode contains a plurality of perforations.
申请公布号 KR101500291(B1) 申请公布日期 2015.03.09
申请号 KR20137010267 申请日期 2011.11.10
申请人 发明人
分类号 G01R27/26;H01L29/84 主分类号 G01R27/26
代理机构 代理人
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