METHOD FOR FABRICATING PASSIVATED EMITTER WITH REAR LOCALLY DIFFUSED CELL

摘要

The present invention relates to a method for fabricating a PERL solar cell which can improve the photoelectric conversion efficiency of a solar cell by applying a double-sided passivation structure to the PERL solar cell. The method for fabricating a PERL solar cell according to the present invention comprises the steps of: preparing a p-type crystalline silicon substrate; respectively forming an n-type emitter and a p-type rear field layer on the inside of the front surface of the substrate and on the inside of the rear surface of the substrate; respectively forming Al_2O_3 passivation layers on the front surface and the rear surface of the substrate by an atomic layer deposition method; respectively stacking a front anti-reflection layer and a rear anti-reflection layer on the passivation layers of the front surface and the rear surface of the substrate; forming a contact hole to expose the p-type rear field layer of the substrate by partially removing the rear anti-reflection layer and the passivation layer of the rear surface of the substrate; applying conductive paste for a rear busbar electrode to the rear anti-reflection layer of the rear surface of the substrate and applying conductive paste for a front electrode to the front surface of the substrate while applying aluminum paste to the entire rear surface of the substrate to sufficiently fill the contact hole; and forming the rear busbar electrode, the front electrode, and a BSF layer by heat-treating the substrate.