APPARATUS FOR ANALYZING CONTAMINANTS IN AIR

摘要

The present invention relates to a contaminant analyzing apparatus. More specifically, the present invention is manufactured in the same form as transfer enclosures or transfer cassettes of a tracked automatic transfer apparatus which transfers a semiconductor wafer used on a semiconductor manufacturing line, or a display glass on a display panel manufacturing line. The contaminant analyzing apparatus can measure and analyze contaminants of many areas in real time on the semiconductor manufacturing line or the display panel manufacturing line using an existing apparatus since an analysis element, which analyzes air gathered in a process transferred by the tracked automatic transfer apparatus in real time, is installed inside a main body.