| 摘要 |
<p>This invention provides a circuit board inspection device (10) which includes a device stage (12), a gantry (20) capable of moving in Y direction on the device stage (12), a probe stage (24) capable of moving in X direction on the gantry (20), a non contact type sensor probe (26), a probe unit set (30), an exchange tray (60) for exchanging the probe assembly contained in the probe unit set (30), and a height reference portion (70) for calibrating the height and position of the probe assembly. The device (10) is further provide with an actuator driving unit (110), a circuit board evaluation unit (112), and a control, unit (120). The control unit (120) contains a maintenance module (124) for calibrating and positioning of circuit board inspection module (122), and automatically performing a process of exchanging the probe when necessary.</p> |
