| 摘要 |
<p>The present invention relates to a transferring guide which prevents particles from penetrating into a chamber for performing a deposition process and prevents a deposition material running toward a substrate from being diffused into the chamber unnecessarily, and an evaporating apparatus using the same. A transferring guide according to the present invention includes a transferring rail, a transferring roller which touches the side of the transferring rail, and a collection part which has an open side which faces the transferring rail to allow the transferring roller to touch the transferring rail and surrounds the transferring roller to collect particles generated between the transferring rail and the transferring roller. The internal cleanliness of the chamber is maintained, thereby forming a good quality layer and providing the convenience of equipment maintenance.</p> |
