| 摘要 |
<p>In the present invention, provided is a method for crystallizing patterns to improve test accuracy while significantly reducing time of plasticizing and testing patterns, comprising a step of turning light emitted from light source into surface light and emitting the surface light to the pattern on substrates, thereby plasticizing the pattern. According to the present invention, the crystallizing method is allowed to crystallize the pattern while testing the same, thereby significantly reducing time of crystallizing and testing the pattern.</p> |
