发明名称 CURABLE COMPOSITION FOR PHOTOIMPRINT AND METHOD OF PRODUCING FILM, OPTICAL COMPONENT, CIRCUIT BOARD, OR ELECTRONIC COMPONENT USING THE COMPOSITION
摘要 A curable composition for photoimprint at least includes a polymerizable compound component (A) and a photopolymerization initiator component (B) and satisfies expression (1) and (2): 0.800 ≤ Er10/Er200 (1) 2.55 ≤ Er10 (2) wherein, Er10 represents the reduced modulus (GPa) of a photocured film prepared by exposing a film of the curable composition for photoimprint to light of 10 mJ/cm2; and Er200 represents the reduced modulus (GPa) of a photocured film prepared by exposing a film of the curable composition for photoimprint to light of 200 mJ/cm2.
申请公布号 WO2015030151(A1) 申请公布日期 2015.03.05
申请号 WO2014JP72666 申请日期 2014.08.22
申请人 CANON KABUSHIKI KAISHA 发明人 HONMA, TAKESHI;ITO, TOSHIKI;KATO, JUN;YONEZAWA, SHIORI;KAWASAKI, YOUJI
分类号 H01L21/027;B29C59/02;C08F2/50 主分类号 H01L21/027
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