发明名称 |
CURABLE COMPOSITION FOR PHOTOIMPRINT AND METHOD OF PRODUCING FILM, OPTICAL COMPONENT, CIRCUIT BOARD, OR ELECTRONIC COMPONENT USING THE COMPOSITION |
摘要 |
A curable composition for photoimprint at least includes a polymerizable compound component (A) and a photopolymerization initiator component (B) and satisfies expression (1) and (2): 0.800 ≤ Er10/Er200 (1) 2.55 ≤ Er10 (2) wherein, Er10 represents the reduced modulus (GPa) of a photocured film prepared by exposing a film of the curable composition for photoimprint to light of 10 mJ/cm2; and Er200 represents the reduced modulus (GPa) of a photocured film prepared by exposing a film of the curable composition for photoimprint to light of 200 mJ/cm2. |
申请公布号 |
WO2015030151(A1) |
申请公布日期 |
2015.03.05 |
申请号 |
WO2014JP72666 |
申请日期 |
2014.08.22 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
HONMA, TAKESHI;ITO, TOSHIKI;KATO, JUN;YONEZAWA, SHIORI;KAWASAKI, YOUJI |
分类号 |
H01L21/027;B29C59/02;C08F2/50 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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