| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device which effectively suppresses transfer of heat generated by a driving mechanism to a sample, and to provide a charged particle beam apparatus using the same.SOLUTION: In order to achieve the purpose, the stage device is proposed which includes a table (1), driving sources (3, 4) for driving the table in a predetermined direction, a first connection member (7) provided between the table and the driving sources, a second connection member (8) provided between the table and the driving sources so as to be closer to the driving source side than the first connection member, a slide unit (16a) supported by the second connection member, and a rail (11a) for guiding the slide unit in the predetermined direction. As the first connection member, a member having a thermal conductivity relatively lower than that of the second connection member is used. The charged particle beam apparatus is also proposed. |
