| 发明名称 |
TURBO-MOLECULAR PUMP |
| 摘要 |
A turbo-molecular pump comprises: a case having a suction port and a flange; a rotor assembly housed inside the case, the rotor assembly having a shaft and a rotor integrated with the shaft with a fastening bolt, the rotor having a plurality of rotor blades formed thereon; a plurality of stator blades housed inside the case and arranged to face the rotor blades; and a plurality of spacers stacked along a peripheral surface of the case, the spacer fixing the stator blades. An anti-corrosion treatment is applied to a gas contacting section in a component that is provided on an evacuation upstream side with respect to an evacuation downstream side end of the first rotor blade from the evacuation upstream side and made of an alloy containing Fe or Cr. |
| 申请公布号 |
US2015063993(A1) |
申请公布日期 |
2015.03.05 |
| 申请号 |
US201414457233 |
申请日期 |
2014.08.12 |
| 申请人 |
SHIMADZU CORPORATION |
发明人 |
TSUTSUI Shingo |
| 分类号 |
F01D5/28;F04D29/54;F04D19/04 |
主分类号 |
F01D5/28 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A turbo-molecular pump comprising:
a case having a suction port and a flange; a rotor assembly housed inside the case, the rotor assembly having a shaft and a rotor integrated with the shaft with a fastening bolt, the rotor having a plurality of rotor blades formed thereon; a plurality of stator blades housed inside the case and arranged to face the rotor blades; and a plurality of spacers stacked along a peripheral surface of the case, the spacer fixing the stator blades, wherein an anti-corrosion treatment is applied to a gas contacting section in a component that is provided on an evacuation upstream side with respect to an evacuation downstream side end of the first rotor blade from the evacuation upstream side and made of an alloy containing Fe or Cr. |
| 地址 |
Kyoto JP |
