CHARGED PARTICLE BEAM DEVICE

摘要

A charged particle beam device that appropriately maintains a throughput of the device for each of specimens different in a gas emission volume from each other is provided. A scanning electron microscope includes an electron source, a specimen stage, a specimen chamber, and an exchange chamber, and further includes a vacuum gauge that measures an internal pressure of the exchange chamber, a time counting unit that counts time taken when a measurement result by the vacuum gauge has reached a predetermined degree of vacuum, and an integral control unit that performs comparative calculation and determination based on a measurement result by the time counting unit and integral control based on a process flow. And, the integral control unit controls changing of a content of a subsequent process based on a shift of the degree of vacuum of the exchange chamber (for example, based on vacuum exhaust time in the exchange chamber when the specimen is in the exchange chamber or a variation of the degree of vacuum of the exchange chamber for a predetermined time interval when the specimen is in the exchange chamber).

主权项

1. A charged particle beam device comprising:
a charged particle source; a specimen stage for holding a specimen to be irradiated with a charged particle beam emitted from the charged particle source; a specimen chamber that turns an atmosphere in which the specimen held by the specimen stage is placed into a vacuum state; a specimen exchange chamber that turns an atmosphere of the specimen to be guided into the specimen chamber into a vacuum state; a vacuum gauge that measures an internal pressure of the specimen exchange chamber; a time measuring unit that measures time taken until a measured result by the vacuum gauge reaches a predetermined degree of vacuum; and an integral control unit that performs comparative calculation and determination based on a measurement result from the time measuring unit and integral control based on a process flow, wherein the integral control unit controls to change a content of a subsequent process based on a shift of the degree of vacuum of the specimen exchange chamber.