COMPOSITE CONVERGENT ION BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a composite convergent ion beam device in which processing can be performed promptly without contaminating a sample such as a silicon wafer and high-resolution observation or precise processing can be performed, a processing observation method and a processing method employing the composite convergent ion beam device.SOLUTION: A composite convergent ion beam device comprises a first ion beam radiation system 10 including a plasma type gas ion source for generating a first ion; and a second ion beam radiation system 20 including a gas field ion source for generating a second ion. A beam diameter of a second ion beam 20A emitted from the second ion beam radiation system 20 is smaller than that of a first ion beam 10A emitted from the first ion beam radiation system 10.