SENSOR DEVICE FOR DETERMINING ROTATIONAL SPEED OF A ROTATABLE OBJECT AND TURBOCHARGER WITH SUCH A SENSOR DEVICE

摘要

The invention relates to a sensor device (20) for determining rotational speed of a rotatable object (26; 2), comprising a sensor housing (21) with a sensor segment (6), a mounting segment (5) and a connector segment (7), the sensor segment (6) and the connector segment (7) being arranged on opposite sides of the mounting segment (5), wherein a sensing element (15) is arranged at the sensor tip (37) of the sensor segment (6), characterized in that sensor electronics (9) are arranged inside the sensor segment (6), the sensor electronics (9) comprising an integrated silicon-on-insulator circuit (10). The integrated silicon-on-insulator circuit (10) is embedded between flexible polymer substrates (24). The invention further relates to a turbocharger (28) with such a sensor device (20). The sensor device (20) is designed to operate continuously at a temperature of at least 200°C.