MECHANICAL METHOD FOR TESTING ELECTRONIC COMPONENTS

摘要

The invention relates to a device for testing microelectronic components (MK). Said type of device comprises an elongate sample holder for housing at least one electronic component which is to be tested and an ultrasonic actuator which comprises an ultrasonic transducer for generating ultrasonic waves and a coupling element which is mechanically joined thereto. Said coupling element transforms said ultrasonic waves into mechanical oscillations and mechanically couples the ultrasonic transducer to the sample holder. Said ultrasonic actuator is designed and coupled to the sample holder such that said sample holder is excited so as to generate a bending oscillation.