METAL TRENCH DE-COUPLING CAPACITOR STRUCTURE AND METHOD FOR FORMING THE SAME

摘要

A metal trench de-coupling capacitor structure includes a vertical trench disposed in a substrate, an insulating layer deposited on the sidewall of the vertical trench, an inter-layer dielectric layer covering the substrate and the insulating layer, and a metal layer penetrating the interlayer dielectric layer to fill up the vertical trench. The metal layer is electrically connected to a power source.

主权项

1. A metal trench de-coupling capacitor structure, comprising:
a substrate which is grounded; a vertical trench disposed in said substrate; an insulating layer disposed on the sidewall of said vertical trench; and an inter-metal connection layer, disposed on said substrate and filling up said vertical trench, wherein said inter-metal connection layer is electrically connected to a power.