| 发明名称 |
Three-Dimensional Semiconductor Image Reconstruction Apparatus and Method |
| 摘要 |
A system comprises an electron beam directed toward a three-dimensional object with one tilting angle and at least two azimuth angles, a detector configured to receive a plurality of scanning electron microscope (SEM) images from the three-dimensional object and a processor configured to calculate a height and a sidewall edge of the three-dimensional object. |
| 申请公布号 |
US2015060669(A1) |
申请公布日期 |
2015.03.05 |
| 申请号 |
US201414536313 |
申请日期 |
2014.11.07 |
| 申请人 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
发明人 |
Cheng Wen-Hao;Tu Chih-Chiang;Fu Chung-Min;Nandoriya Ajay |
| 分类号 |
G06T15/10;H01J37/26;H01J37/28 |
主分类号 |
G06T15/10 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A system comprising:
an electron beam directed toward a three-dimensional object with one tilting angle and at least two azimuth angles; a detector configured to receive a plurality of scanning electron microscope (SEM) images from the three-dimensional object; and a processor configured to calculate a height and a sidewall edge of the three-dimensional object based upon the SEM images. |
| 地址 |
Hsin-Chu TW |
