SYSTEM FOR FORMING MULTINARY NANOPARTICLE FILM AND METHOD FOR FORMING NANOPARTICLE FILM USING SAME

摘要

A multinary nanoparticle film forming system includes: a generating chamber with a plurality of metal materials arranged therein so as to generate multinary nanoparticles from nanoparticles; a film forming chamber with a substrate arranged therein; and granulation units arranged in the generating chamber so as to respectively correspond to the plurality of metal materials. Further, each of the granulation units includes each of containers respectively covering the metal materials, each of heaters respectively arranged in the containers, each of outflow ports respectively provided at the containers so as to enable the nanoparticles to flow out therefrom, and each of inflow ports respectively provided at the containers so as to enable the coolant gas to be respectively introduced into the containers.

主权项

1. A multinary nanoparticle film forming system comprising:
a generating chamber with a plurality of metal materials arranged therein so as to generate multinary nanoparticles from nanoparticles formed from each of the metal materials; a film forming chamber with a substrate arranged therein so as to enable a film of the multinary nanoparticles to be formed on the substrate; a communication pipe configured to connect the generating chamber to the film forming chamber; an exhaust unit configured to carry out exhaust from the film forming chamber; a coolant-gas introduction unit configured to introduce coolant gas into the generating chamber; and granulation units arranged in the generating chamber so as to respectively correspond to the plurality of metal materials, wherein the granulation unit includes a container covering each of the metal materials, a heater arranged in the container, an outflow port provided at the container so as to enable the nanoparticles to flow out therefrom, and an inflow port provided at the container so as to enable the coolant gas to be introduced into the container.