发明名称 |
SUBSTRATE PIECE MANUFACTURING METHOD, SUBSTRATE JIG AND SUBSTRATE JIG SET |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method of a substrate jig which can cut and separate substrate pieces from one substrate by etching, and can pick up a substrate piece after separation by cutting with high efficiency.SOLUTION: A substrate piece manufacturing method comprises: a step of preparing at least one substrate on which protection films are provided on both surfaces in a manner such that outlines of a plurality of substrate pieces are exposed in a matrix shape; a step of arranging one lateral face of the first substrate opposite to a plurality of one-side inner frames in a manner such that each of the plurality of substrate pieces of the first substrate prepared in the step of preparing the substrate is arranged correspondingly to each one-side magnet; and a step of arranging on the other lateral face of the first substrate, a plurality of first other-side magnets or a plurality of first other-side magnetic bodies correspondingly to respective one-side magnets in a manner such that each substrate piece of the first substrate is impressed to the corresponding one-side magnet.</p> |
申请公布号 |
JP2015043384(A) |
申请公布日期 |
2015.03.05 |
申请号 |
JP20130174841 |
申请日期 |
2013.08.26 |
申请人 |
DAINIPPON PRINTING CO LTD |
发明人 |
INOUE KAZUHIRO;SAKANO SHINICHI;TAKEKOSHI TAKASHI |
分类号 |
H01L21/683;H01L21/306 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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