发明名称 SUBSTRATE PIECE MANUFACTURING METHOD, SUBSTRATE JIG AND SUBSTRATE JIG SET
摘要 <p>PROBLEM TO BE SOLVED: To provide a manufacturing method of a substrate jig which can cut and separate substrate pieces from one substrate by etching, and can pick up a substrate piece after separation by cutting with high efficiency.SOLUTION: A substrate piece manufacturing method comprises: a step of preparing at least one substrate on which protection films are provided on both surfaces in a manner such that outlines of a plurality of substrate pieces are exposed in a matrix shape; a step of arranging one lateral face of the first substrate opposite to a plurality of one-side inner frames in a manner such that each of the plurality of substrate pieces of the first substrate prepared in the step of preparing the substrate is arranged correspondingly to each one-side magnet; and a step of arranging on the other lateral face of the first substrate, a plurality of first other-side magnets or a plurality of first other-side magnetic bodies correspondingly to respective one-side magnets in a manner such that each substrate piece of the first substrate is impressed to the corresponding one-side magnet.</p>
申请公布号 JP2015043384(A) 申请公布日期 2015.03.05
申请号 JP20130174841 申请日期 2013.08.26
申请人 DAINIPPON PRINTING CO LTD 发明人 INOUE KAZUHIRO;SAKANO SHINICHI;TAKEKOSHI TAKASHI
分类号 H01L21/683;H01L21/306 主分类号 H01L21/683
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