| 发明名称 |
MICROMECHANICAL COMPONENT AND CORRESPONDING TEST METHOD FOR A MICROMECHANICAL COMPONENT |
| 摘要 |
A micromechanical component and a corresponding test method for a micromechanical component are described. The micromechanical component includes at least one first region, which is elastically connected to a second region via a spring device, a resistor element, which is situated in and/or on the spring device and is at least partially interruptible in the event of damage to the spring device, and a detection device, which is electrically connected to the resistor element, for detecting an interruption in the resistor element and for generating a corresponding detection signal. |
| 申请公布号 |
US2015061695(A1) |
申请公布日期 |
2015.03.05 |
| 申请号 |
US201414471436 |
申请日期 |
2014.08.28 |
| 申请人 |
REISS Sebastian;ARMBRUSTER Simon;GRUTZECK Helmut;MUCHOW Joerg;NJIMONZIE Frederic Njikam;BAADER Johannes;STRAUB Rainer;HEINZELMANN Wolfgang |
发明人 |
REISS Sebastian;ARMBRUSTER Simon;GRUTZECK Helmut;MUCHOW Joerg;NJIMONZIE Frederic Njikam;BAADER Johannes;STRAUB Rainer;HEINZELMANN Wolfgang |
| 分类号 |
B81B7/00 |
主分类号 |
B81B7/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A micromechanical component, comprising:
at least one first region; a second region; a spring device via which the first region is connected elastically to the second region; a resistor element situated at least one of in and on the spring device, the resistor element being at least partially interruptible in the event of damage to the spring device; and a detection device electrically connected to the resistor element, for detecting an interruption in the resistor element, and for generating a corresponding detection signal. |
| 地址 |
Reutlingen DE |
