| 发明名称 |
METHOD FOR PRODUCING LAMINATE, AND LAMINATE |
| 摘要 |
<p>A method for producing a laminate (21) which is provided with a substrate (11), a light-transmitting support plate (12) that supports the substrate (11), and a first separation layer (15) that is arranged between the substrate (11) and the support plate (12) and is altered in properties by means of absorption of light that is irradiated thereon through the support plate (12). The first separation layer (15) is formed by plasma processing using a reaction gas that contains a fluorine compound and an organic compound having an unsaturated bond.</p> |
| 申请公布号 |
WO2015029577(A1) |
申请公布日期 |
2015.03.05 |
| 申请号 |
WO2014JP67181 |
申请日期 |
2014.06.27 |
| 申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
MATSUSHITA, ATSUSHI;MITAKE, TATSUHIRO |
| 分类号 |
H01L21/02;H01L21/304;H01L27/12 |
主分类号 |
H01L21/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
