| 摘要 |
<p>[Problem] To provide a capacitive sensor, detection system, and robot system that have simple structures and can be made to be compact. [Solution] A detection system (1-1) is provided with a capacitive sensor (2), a rotation angle calculation unit (3), and a positional displacement amount calculation unit (4). The capacitive sensor (2) has a substrate (20), a guard electrode (21), an adsorption electrode (22), four first electrodes (23), and two pairs of second electrodes (24, 25). The rotation angle calculation unit (3) calculates the angle (θ) of rotation from the initial position of a workpiece (W) on the basis of the sum of the capacitances of the portions where the first electrodes (23) and the workpiece (W) overlap. The positional displacement amount calculation unit (4) determines the positional displacement amounts (δx,δy) from the initial position of the workpiece (W) in the x-axis direction and y-axis direction on the basis of the change in the capacitances of the portions where the second electrode pairs (24, 25) and the workpiece (W) overlap and the rotation angle (θ) from the rotation angle calculation unit (3).</p> |
