PROCESS MODULE, MANUFACTURING METHOD THEREOF AND PROCESSING METHOD OF SUBSTRATE USING THE PROCESS MODULE

摘要

The present invention relates to a process module, a manufacturing method thereof and a method for treating a substrate using the process module. The process module is formed by fixing a plurality of cell substrates to a carrier member with an adhesive depending on a predetermined alignment standard. The manufacturing method thereof comprises the steps of: aligning the cell substrates depending on the predetermined alignment standard; spreading an adhesive to at least one of opposite surfaces between the cell substrates and the carrier member; and bonding the cell substrates and the carrier member using the adhesive. The method for treating a substrate is configured to perform a substrate treatment process of the cell substrates at the same time by integrating the processing module, and may selectively include correcting the alignment standard of the cell substrates in the substrate treatment process with an aligned state of the cell substrates in the process module.